US 12,300,532 B2
Wafer frame sorter and stocker
Tsung-Sheng Kuo, Hsinchu (TW); I-Lun Yang, Hsinchu (TW); Chih-Hung Huang, Hsinchu (TW); Jiun-Rong Pai, Hsinchu (TW); Chung-Hsin Chien, Hsinchu (TW); and Yang-Ann Chu, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Jan. 12, 2022, as Appl. No. 17/574,302.
Application 17/574,302 is a continuation of application No. 16/807,026, filed on Mar. 2, 2020, granted, now 11,251,064.
Prior Publication US 2022/0139757 A1, May 5, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/687 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/68707 (2013.01) [H01L 21/67271 (2013.01); H01L 21/67294 (2013.01); H01L 21/6773 (2013.01); H01L 21/67733 (2013.01); H01L 21/67742 (2013.01); H01L 21/67769 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system, comprising:
one or more memories storing software instructions for performing a method for managing storage and transfer of wafer frames; and
one or more processors configured to execute the software instructions, the method including:
transferring a first wafer frame cassette including a plurality of wafer frames to a first transfer port;
transferring, with a robot arm, each wafer frame from the first wafer frame cassette into a respective storage slot of a plurality of storage slots;
retrieving, with the robot arm, the wafer frames from their respective storage slots; and
transferring, with the robot arm, the wafer frames to a second wafer frame cassette at a second transfer port.