US 12,300,527 B2
System and method to evaporate an OLED layer stack in a vertical orientation
Sebastian Gunther Zang, Grossostheim (DE); and Jürgen Henrich, Limeshain (DE)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Appl. No. 17/629,123
Filed by Applied Materials, Inc., Santa Clara, CA (US)
PCT Filed Jul. 25, 2019, PCT No. PCT/EP2019/070109
§ 371(c)(1), (2) Date Jan. 21, 2022,
PCT Pub. No. WO2021/013358, PCT Pub. Date Jan. 28, 2021.
Prior Publication US 2022/0293892 A1, Sep. 15, 2022
Int. Cl. H01L 21/677 (2006.01); H10K 71/16 (2023.01); H10K 71/00 (2023.01)
CPC H01L 21/67718 (2013.01) [H10K 71/164 (2023.02); H10K 71/00 (2023.02)] 6 Claims
OG exemplary drawing
 
1. A vacuum orientation module for a substrate processing system, comprising:
at least a first vacuum orientation chamber, comprising:
a vacuum chamber;
a transportation track within the vacuum chamber, the transportation track having a support structure and a driving structure and defining a transportation direction; and
an orientation actuator to change the substrate orientation between a non-vertical orientation and a non-horizontal orientation, the vacuum chamber has two slit openings at opposing side walls of the vacuum chamber in the transportation direction, wherein the two slit openings are two essentially vertical slit openings and the vacuum chamber has a non-vertical slit opening, wherein a substrate can be loaded onto a substrate carrier through the non-vertical slit opening in the non-vertical orientation, the substrate carrier comprising an electrostatic chuck.