US 12,299,869 B2
Computing device for predicting a profile using deep learning and operating method thereof
Hyeok Lee, Suwon-si (KR); Jaewon Yang, Suwon-si (KR); Sangchul Yeo, Osan-si (KR); Eunju Kim, Yongin-si (KR); and Sooryong Lee, Seoul (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Jun. 25, 2022, as Appl. No. 17/849,617.
Claims priority of application No. 10-2021-0181312 (KR), filed on Dec. 17, 2021.
Prior Publication US 2023/0196545 A1, Jun. 22, 2023
Int. Cl. G06T 19/00 (2011.01); A61B 6/00 (2024.01); A61B 6/02 (2006.01); G06F 3/04815 (2022.01); G06F 3/04842 (2022.01); G06F 30/27 (2020.01); G06T 7/00 (2017.01); G06V 10/10 (2022.01); G06V 10/46 (2022.01)
CPC G06T 7/0006 (2013.01) [G06F 30/27 (2020.01); G06V 10/10 (2022.01); G06V 10/46 (2022.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An operating method of a computing device for predicting a profile using deep learning, the operating method comprising:
sampling coordinates of a unique pattern across a full chip;
extracting a contour of a resist profile of each of a plurality of heights by performing rigorous simulation at each coordinate of the unique pattern;
preparing an input image and an output image corresponding to the contour of each of the plurality of heights;
performing deep learning on the extracted contour using the input image and the output image; and
generating a profile prediction model according to the performing of the deep learning,
wherein the sampled coordinates are less than all coordinates of the full chip.