US 12,298,737 B2
Information processing apparatus, information processing method, article manufacturing system, and article manufacturing method
Yoshihiro Kawauchi, Tochigi (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jan. 31, 2022, as Appl. No. 17/589,485.
Claims priority of application No. 2021-016442 (JP), filed on Feb. 4, 2021.
Prior Publication US 2022/0244700 A1, Aug. 4, 2022
Int. Cl. G06F 3/14 (2006.01); B41M 3/00 (2006.01); G05B 19/409 (2006.01)
CPC G05B 19/409 (2013.01) [B41M 3/00 (2013.01); G06F 3/14 (2013.01); G05B 2219/32128 (2013.01); G05B 2219/36072 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An information processing apparatus comprising:
an acquisition unit configured to acquire information including first processing data indicating a result of substrate processing performed by a first substrate processing apparatus, and second processing data indicating a result of substrate processing performed by a second substrate processing apparatus different from the first substrate processing apparatus; and
a display control unit configured to control display on a display device based on the information acquired by the acquisition unit,
wherein the display control unit displays the first processing data and the second processing data in different regions, and displays information indicating a processing condition under which the substrate processing is performed, and
the processing condition includes a recipe that is a processing condition shared by a plurality of apparatuses including the first substrate processing apparatus and the second substrate processing apparatus, and an apparatus parameter that is a processing condition not shared by the plurality of apparatuses.