US 12,298,670 B2
Apparatus for and methods of combining multiple laser beams
Rabin Paudel, Portland, OR (US); Eric Anders Mason, San Diego, CA (US); Gamaralalage G. Padmabandu, San Diego, CA (US); and John Theodore Melchior, San Diego, CA (US)
Assigned to Cymer, LLC, San Diego, CA (US)
Appl. No. 17/779,362
Filed by Cymer, LLC, San Diego, CA (US)
PCT Filed Oct. 27, 2020, PCT No. PCT/US2020/057571
§ 371(c)(1), (2) Date May 24, 2022,
PCT Pub. No. WO2021/108054, PCT Pub. Date Jun. 3, 2021.
Claims priority of provisional application 62/941,971, filed on Nov. 29, 2019.
Prior Publication US 2023/0004091 A1, Jan. 5, 2023
Int. Cl. G03F 7/00 (2006.01); H01S 3/00 (2006.01); H01S 3/225 (2006.01); H01S 3/23 (2006.01)
CPC G03F 7/7005 (2013.01) [G03F 7/70025 (2013.01); G03F 7/70041 (2013.01); H01S 3/0071 (2013.01); H01S 3/225 (2013.01); H01S 3/2391 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A gas discharge laser system comprising:
a first laser chamber module adapted to generate a first beam of laser radiation;
a second laser chamber module adapted to generate a second beam of laser radiation; and
a beam combiner arranged to receive the first beam and the second beam and adapted to propagate the first beam and the second beam in a common direction, the beam combiner comprising a mirror and an actuator mechanically coupled to the mirror,
the first beam of laser radiation initially travelling in a first direction and striking the mirror at a first location and the second beam of laser radiation initially travelling in a second direction at an angle to the first direction and striking the mirror at the first location,
the actuator being arranged to rotate the mirror between a first position in which the mirror redirects the first beam of laser radiation to propagate in the common direction and a second position in which the mirror redirects the second beam of laser radiation to propagate in the common direction.