US 12,298,490 B2
Method for automatically determining the position in a sample arrangement and corresponding microscope
Tobias Hofmann, Solms (DE); Christof Stey, Wetzlar (DE); and Volker Schacht, Marburg (DE)
Assigned to LEICA MICROSYSTEMS CMS GMBH, Wetzlar (DE)
Appl. No. 17/298,623
Filed by LEICA MICROSYSTEMS CMS GMBH, Wetzlar (DE)
PCT Filed Dec. 4, 2019, PCT No. PCT/EP2019/083725
§ 371(c)(1), (2) Date May 31, 2021,
PCT Pub. No. WO2020/115160, PCT Pub. Date Jun. 11, 2020.
Claims priority of application No. 10 2018 131 427.2 (DE), filed on Dec. 7, 2018.
Prior Publication US 2022/0050281 A1, Feb. 17, 2022
Int. Cl. G02B 21/26 (2006.01); G02B 21/02 (2006.01); G02B 21/34 (2006.01); G02B 21/36 (2006.01)
CPC G02B 21/26 (2013.01) [G02B 21/02 (2013.01); G02B 21/34 (2013.01); G02B 21/365 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A method for automatically ascertaining a plurality of positions on a sample arrangement in an object space of a microscope, which comprises a microscope objective, which defines an optical axis, the method comprising:
generating a measurement beam by a light source of a triangulating autofocus device, and directing the measurement beam onto the sample arrangement;
capturing a reflected measurement beam reflected by the sample arrangement by a detector of the triangulating autofocus device, which generates an output signal;
displacing the sample arrangement in at least one direction perpendicular to the optical axis as a displacement; and
ascertaining the plurality of positions on the sample arrangement based on the output signals generated by the detector during the displacement in the at least one direction, wherein the triangulating autofocus device is configured not to compensate displacements of the autofocus measurement beam along the optical axis during the displacing the sample arrangement and the ascertaining the plurality of positions on the sample arrangement.