US 12,298,488 B2
Device and method for multi-spot scanning microscopy
Daniel Schwedt, Jena (DE); and Tiemo Anhut, Jena (DE)
Assigned to CARL ZEISS MICROSCOPY GMBH, Jena (DE)
Filed by Carl Zeiss Microscopy GmbH, Jena (DE)
Filed on Apr. 12, 2022, as Appl. No. 17/719,047.
Claims priority of application No. 10-2021-203620.1 (DE), filed on Apr. 13, 2021.
Prior Publication US 2022/0326493 A1, Oct. 13, 2022
Int. Cl. G02B 21/00 (2006.01); G01N 21/64 (2006.01)
CPC G02B 21/0032 (2013.01) [G01N 21/6458 (2013.01); G02B 21/0076 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A device for multi-spot scanning microscopy, the device comprising:
a device for providing at least two partial illumination beams,
a filter device for setting a spectral characteristic of the at least two partial illumination beams,
first optical means for providing an illumination beam path for guiding and focusing each of the individual partial illumination beams in a light spot on or in a sample to be examined,
a scanning unit for guiding the light spot over the sample,
a detection unit for detecting detection light, which the sample emits in partial detection beams after irradiation using the individual partial light beams,
second optical means for providing a detection beam path for guiding the partial detection beams onto the detection unit,
a control and evaluation unit for activating the scanning unit and for evaluating the detection light detected by the detection unit,
wherein,
the first optical means and the second optical means have as shared components at least one beam splitter, which is segmented laterally to a surface normal of a color separator in at least two filter fields for selection of wavelength ranges, polarization directions, or a combination of wavelength ranges and polarization directions, and
at least one of the filter fields is formed by means of a dielectric filter layer system.