US 12,298,328 B2
Controlling alignment during a thermal cycle
Scott E. Lindsey, Brentwood, CA (US); Junjye Yeh, Livermore, CA (US); Jovan Jovanovic, Santa Clara, CA (US); and Seang P. Malathong, Newark, CA (US)
Assigned to AEHR TEST SYSTEMS, Fremont, CA (US)
Filed by AEHR TEST SYSTEMS, Fremont, CA (US)
Filed on Mar. 12, 2024, as Appl. No. 18/602,925.
Application 17/391,998 is a division of application No. 16/511,816, filed on Jul. 15, 2019, granted, now 11,112,429, issued on Sep. 7, 2021.
Application 16/511,816 is a division of application No. 15/839,707, filed on Dec. 12, 2017, granted, now 10,401,385, issued on Sep. 3, 2019.
Application 15/839,707 is a division of application No. 15/453,819, filed on Mar. 8, 2017, granted, now 9,880,197, issued on Jan. 30, 2018.
Application 15/453,819 is a division of application No. 14/583,545, filed on Dec. 26, 2014, granted, now 9,625,521, issued on Apr. 18, 2017.
Application 14/583,545 is a division of application No. 13/223,319, filed on Sep. 1, 2011, granted, now 8,947,116, issued on Feb. 3, 2015.
Application 13/223,319 is a division of application No. 12/411,233, filed on Mar. 25, 2009, granted, now 8,030,957, issued on Oct. 4, 2011.
Application 18/602,925 is a continuation of application No. 18/159,794, filed on Jan. 26, 2023, granted, now 11,977,098.
Application 18/159,794 is a continuation of application No. 17/391,998, filed on Aug. 2, 2021, granted, now 11,592,465, issued on Feb. 28, 2023.
Prior Publication US 2024/0230714 A1, Jul. 11, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 31/26 (2020.01); G01R 31/28 (2006.01)
CPC G01R 1/0441 (2013.01) [G01R 1/0416 (2013.01); G01R 1/0491 (2013.01); G01R 1/06705 (2013.01); G01R 1/07307 (2013.01); G01R 31/2601 (2013.01); G01R 31/2855 (2013.01); G01R 31/2863 (2013.01); G01R 31/2886 (2013.01); G01R 31/2887 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A method of testing an integrated circuit of a device, comprising:
holding the device against a surface of a holder;
moving a contactor board assembly vertically relative to the holder to bring terminals of a contactor support structure of the contactor board assembly into contact with contacts on the device;
providing signals through the terminals and contacts to the integrated circuit, wherein the contactor support structure includes a contactor substrate connected to a distribution board substrate with at least a first connecting arrangement, the first connecting arrangement including first and second connecting pieces with complementary interengaging formations that allow for movement of the contactor substrate relative to the distribution board substrate by sliding horizontally relative to each other in a first radial direction and horizontally restricts movement of the contactor substrate relative to the distribution board substrate in a first tangential direction transverse to the first radial direction; and
moving the contactor board assembly vertically relative to the holder to disengage the terminals of the contactor support structure from the contacts on the device.