US 12,298,257 B2
Monolithic particle inspection device
Ilse Van Weperen, Veldhoven (NL); Arjan Johannes Anton Beukman, Son en Breugel (NL); Mohamed Swillam, Wilton, CT (US); Justin Lloyd Kreuzer, Trumbull, CT (US); and Stephen Roux, New Fairfield, CT (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 18/012,801
Filed by ASML Netherlands B.V., Veldhoven (NL); and ASML Holding N.V., Veldhoven (NL)
PCT Filed Jun. 9, 2021, PCT No. PCT/EP2021/065540
§ 371(c)(1), (2) Date Dec. 23, 2022,
PCT Pub. No. WO2021/259646, PCT Pub. Date Dec. 30, 2021.
Claims priority of provisional application 63/197,194, filed on Jun. 4, 2021.
Claims priority of provisional application 63/043,543, filed on Jun. 24, 2020.
Prior Publication US 2023/0266255 A1, Aug. 24, 2023
Int. Cl. G01N 21/956 (2006.01)
CPC G01N 21/956 (2013.01) [G01N 2021/95676 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A system, comprising:
a radiation source configured to generate coherent radiation;
a grating structure optically coupled to the radiation source and configured to:
receive the coherent radiation from the radiation source,
generate a focused coherent radiation beam based on the coherent radiation,
transmit the focused coherent radiation beam toward a region of a surface of a substrate, wherein the grating structure comprises a grating with variable line spacing and is coupled to the radiation source via a waveguide, and
receive photons scattered from the region in response to an illumination of the region by the focused coherent radiation beam; and
a photodetector optically coupled to the grating structure and configured to:
measure the photons received by the grating structure, and
generate an electronic signal based on the measured photons.