CPC F28D 15/0233 (2013.01) [F28D 15/0266 (2013.01); F28D 15/046 (2013.01); H01L 23/427 (2013.01); H05K 7/20309 (2013.01)] | 17 Claims |
1. A vapor chamber in which a working fluid is enclosed, the vapor chamber comprising:
a first metallic sheet;
a second metallic sheet on the first metallic sheet;
a vapor flow path portion through which a vapor of the working fluid passes; and
a liquid flow path portion through which the working fluid in liquid form passes, wherein
the liquid flow path portion is in a surface of the first metallic sheet on a side of the second metallic sheet,
the liquid flow path portion includes a first main flow groove and a second main flow groove each of which extends in a first direction and through which the working fluid in liquid form pass, a first communicating groove extending in a second direction intersecting the first direction in a planar view and communicating the first main flow groove and the second main flow groove, and a first convex array adjacent to the first main flow groove and adjacent to the second main flow groove, the first convex array including a plurality of first convex portions arranged in the first direction and being separated via the first communicating groove,
the width of the first communicating groove, which is perpendicular to the second direction, is larger than the width of the first main flow groove, which is perpendicular to the first direction, and the width of the second main flow groove, which is perpendicular to the first direction, and
the depth of the first communicating groove is deeper than the depth of the first main flow groove and the depth of the second main flow groove.
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