US 12,297,959 B2
Gas cylinder automation system
Jinho So, Seoul (KR); Kwangiun Kim, Ansan-si (KR); Chigun An, Suwon-si (KR); Huigwan Lee, Hwaseong-si (KR); Hyungho Choi, Suwon-si (KR); and Junhyong Lee, Suwon-si (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Jul. 28, 2022, as Appl. No. 17/876,064.
Claims priority of application No. 10-2021-0141644 (KR), filed on Oct. 22, 2021.
Prior Publication US 2023/0129083 A1, Apr. 27, 2023
Int. Cl. F17C 13/02 (2006.01); F17C 13/08 (2006.01); G01C 9/00 (2006.01); G01L 5/00 (2006.01); G01P 15/00 (2006.01)
CPC F17C 13/02 (2013.01) [F17C 13/084 (2013.01); G01C 9/00 (2013.01); G01L 5/00 (2013.01); G01P 15/00 (2013.01); F17C 2201/0104 (2013.01); F17C 2205/0107 (2013.01); F17C 2205/013 (2013.01); F17C 2250/034 (2013.01); F17C 2250/0465 (2013.01); F17C 2250/0478 (2013.01); F17C 2250/0482 (2013.01); F17C 2250/0491 (2013.01); F17C 2270/0518 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A gas cylinder automation system comprising:
a gas cylinder delivery system including a plurality of mobile robots configured to automatically supply gas cylinders along a transfer path from one of a gas cylinder storage queue or gas storage cabinet of the gas cylinder automation system to a semiconductor process line; and
a cylinder-type sensor configured to check whether the transfer path is abnormal by moving along the transfer path by one of the plurality of mobile robots,
wherein the cylinder-type sensor includes:
a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and the cylinder head having a first detecting sensor on the end cap fastening member, the first detecting sensor being configured to detect a torque applied to the end cap; and
a cylinder body connected to the cylinder head and having a second detecting sensor on the cylinder body, the second detecting sensor including one of an acceleration sensor or an inclination sensor.