US 12,297,946 B2
Modular multi-directional gas mixing block
Daemian Raj Benjamin Raj, Fremont, CA (US); Kiran Garikipati, Santa Clara, CA (US); Kurt R. Langeland, San Jose, CA (US); and Syed A. Alam, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 10, 2023, as Appl. No. 18/181,959.
Claims priority of provisional application 63/318,771, filed on Mar. 10, 2022.
Prior Publication US 2023/0288007 A1, Sep. 14, 2023
Int. Cl. F16L 41/03 (2006.01); B01F 25/43 (2022.01); B01F 101/58 (2022.01); G05D 11/13 (2006.01)
CPC F16L 41/03 (2013.01) [B01F 25/43 (2022.01); G05D 11/132 (2013.01); B01F 2101/58 (2022.01)] 20 Claims
OG exemplary drawing
 
1. A modular gas block, comprising:
a block body having an inlet end and an outlet end, the block body defining a portion of a first gas path along a length of the block body and defines a second gas path along a width of the block body, wherein:
the first gas path comprises a plurality of channel segments defined within the block body;
the inlet end of the block body defines a gas inlet that is fluidly coupled with the first gas path;
an upper surface of the block body defines a first plurality of fluid ports that are fluidly coupled with the first gas path;
a first fluid port of the first plurality of fluid ports is fluidly coupled with the gas inlet;
at least some of the first plurality of fluid ports are coupled with one another via a respective one of the plurality of channel segments; and
the upper surface of the block body defines a lateral fluid port that is spaced apart from a respective one of the first plurality of fluid ports along the width of the block body and is coupled with the respective one of the first plurality of fluid ports via the second gas path.