US 12,297,530 B2
Metal mask, method of manufacturing the same, and method of manufacturing display panel using the metal mask
Hyosung Kim, Hwaseong-si (KR); JinYoung Choi, Suwon-si (KR); Sungmin Hur, Yongin-si (KR); Nari Ahn, Seongnam-si (KR); Hyeongsuk Yoo, Asan-si (KR); and Dongwon Han, Seoul (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Jul. 6, 2023, as Appl. No. 18/347,956.
Application 18/347,956 is a division of application No. 16/892,415, filed on Jun. 4, 2020, granted, now 11,739,420.
Claims priority of application No. 10-2019-0113594 (KR), filed on Sep. 16, 2019.
Prior Publication US 2023/0349038 A1, Nov. 2, 2023
Int. Cl. C23C 16/04 (2006.01); C22C 38/08 (2006.01); H10K 50/844 (2023.01); H10K 59/12 (2023.01); H10K 71/00 (2023.01); H10K 71/10 (2023.01)
CPC C23C 16/042 (2013.01) [C22C 38/08 (2013.01); H10K 50/844 (2023.02); H10K 59/12 (2023.02); H10K 71/00 (2023.02); H10K 71/10 (2023.02); H10K 59/1201 (2023.02)] 14 Claims
OG exemplary drawing
 
1. A method for manufacturing a deposition mask, the method comprising:
providing a metal mask body comprising a deposition opening; and
providing a coating layer comprising aluminum oxynitride, on the metal mask body,
wherein the aluminum oxynitride is represented by AlNx·(Al2O3)1-x (x=0.1-0.9).