US 12,297,528 B2
Optical film, sputtering target, and method of producing optical film
Hideharu Okami, Niihama (JP)
Assigned to SUMITOMO METAL MINING CO., LTD., Tokyo (JP)
Appl. No. 17/635,337
Filed by SUMITOMO METAL MINING CO., LTD, Tokyo (JP)
PCT Filed Jun. 24, 2020, PCT No. PCT/JP2020/024833
§ 371(c)(1), (2) Date Feb. 14, 2022,
PCT Pub. No. WO2021/033425, PCT Pub. Date Feb. 25, 2021.
Claims priority of application No. 2019-151927 (JP), filed on Aug. 22, 2019.
Prior Publication US 2022/0316049 A1, Oct. 6, 2022
Int. Cl. G02B 5/20 (2006.01); C03C 17/245 (2006.01); C03C 17/34 (2006.01); C23C 14/00 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); C23C 14/54 (2006.01); H01J 37/34 (2006.01); C23C 4/08 (2016.01); C23C 4/134 (2016.01)
CPC C23C 14/3414 (2013.01) [C03C 17/245 (2013.01); C03C 17/3417 (2013.01); C23C 14/0042 (2013.01); C23C 14/0094 (2013.01); C23C 14/083 (2013.01); C23C 14/352 (2013.01); C23C 14/548 (2013.01); G02B 5/208 (2013.01); H01J 37/3423 (2013.01); H01J 37/3429 (2013.01); H01J 37/3464 (2013.01); C03C 2217/228 (2013.01); C03C 2218/155 (2013.01); C03C 2218/156 (2013.01); C23C 4/08 (2013.01); C23C 4/134 (2016.01); H01J 2237/332 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An optical film having transmissivity in a visible wavelength band, having absorbance in a near-infrared wavelength band, and having radio wave transparency, characterized in that the optical film comprises cesium, tungsten, and oxygen, and
a refractive index n and an extinction coefficient k of the optical film at each of wavelengths [300 nm, 350 nm, 400 nm, 450 nm, . . . , 1700 nm] specified at 50 nm intervals in a wavelength region from 300 nm to 1700 nm are set respectively within numerical ranges of a TABLE, as set forth below:
TABLE
 
Wavelength Refractive Extinction
(nm) Index Coefficient
 
 
300 7.7 to 3.2 0.6 to 1.6
350 2.1 to 3.1 0.0 to 0.8
400 1.8 to 2.8 0.0 to 0.6
450 1.6 to 2.6 0.0 to 0.6
500 1.4 to 2.4 0.0 to 0.6
550 1.1 to 2.1 0.0 to 0.6
600 0.8 to 1.8 0.0 to 0.7
650 0.6 to 1.6 0.1 to 1.1
700 0.7 to 1.7 0.5 to 1.5
750 0.9 to 1.9 0.6 to 1.6
800 1.1 to 2.1 0.5 to 1.5
850 1.0 to 2.0 0.4 to 1.4
900 0.8 to 1.8 0.4 to 1.4
950 0.6 to 1.6 0.4 to 1.4
1000 0.4 to 1.4 0.6 to 1.6
1050 0.3 to 1.3 0.8 to 1.8
1100 0.3 to 1.3 1.1 to 2.1
1150 0.2 to 1.2 1.3 to 2.3
1200 0.3 to 1.3 1.4 to 2.4
1250 0.3 to 1.3 1.6 to 2.6
1300 0.3 to 1.3 1.8 to 2.8
1350 0.3 to 1.3 1.9 to 2.9
1400 0.3 to 1.3 2.1 to 3.1
1450 0.3 to 1.3 2.2 to 3.2
1500 0.3 to 1.3 2.4 to 3.4
1550 0.4 to 1.4 2.5 to 3.5
1600 0.4 to 1.4 2.6 to 3.6
1650 0.4 to 1.4 2.8 to 3.8
1700 0.5 to 1.5  2.9 to 3.9.