US 12,297,526 B2
Hybrid mask stick and mask frame assembly employing the same
Jaesoo Ha, Yongin-si (KR); Suhwan Lee, Yongin-si (KR); Sungho Seo, Yongin-si (KR); and Kwangtae Yu, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-Si (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Feb. 21, 2024, as Appl. No. 18/582,668.
Application 18/582,668 is a division of application No. 16/443,520, filed on Jun. 17, 2019, granted, now 11,939,657.
Claims priority of application No. 10-2018-0109178 (KR), filed on Sep. 12, 2018.
Prior Publication US 2024/0295019 A1, Sep. 5, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 14/04 (2006.01); H10K 59/12 (2023.01); H10K 71/00 (2023.01); H10K 71/16 (2023.01)
CPC C23C 14/042 (2013.01) [H10K 59/12 (2023.02); H10K 71/00 (2023.02); H10K 71/166 (2023.02)] 7 Claims
OG exemplary drawing
 
1. A mask frame assembly comprising:
a mask frame including an opening;
a mask stick assembly arranged on the mask frame and including at least one first mask stick that extends in a first direction, at least one second mask stick that extends in a second direction intersecting the first direction, and a plurality of third mask sticks that is coupled to ends of each of the at least one first mask stick and the at least one second mask stick and defines a plurality of deposition areas,
wherein a thickness of each of the at least one first mask stick is different from a thickness of each of the at least one second mask stick, and a partial etching portion is arranged at a portion where the at least one first mask stick and the at least one second mask stick are coupled to each other,
wherein each of the at least one first mask stick includes a first stick member and a second stick member that is arranged on and overlaps the first stick member, and the partial etching portion is arranged in a portion where the second stick member and the at least one second mask stick are coupled to each other, and
wherein the partial etching portion comprises:
a first partial etching portion arranged in the second stick member and having a thickness that is smaller than a thickness of other portions of the second stick member; and
a second partial etching portion arranged in each of the at least one second mask stick and having a thickness that is smaller than a thickness of other portions of the at least one second mask stick.