CPC C02F 1/444 (2013.01) [B01D 61/18 (2013.01); B01D 61/22 (2013.01); B01D 63/02 (2013.01); B01D 2311/25 (2013.01); B01D 2313/50 (2013.01); C02F 2103/04 (2013.01); C02F 2209/03 (2013.01); C02F 2301/046 (2013.01)] | 12 Claims |
9. A method of facilitating polishing of ultrapure water (UPW), comprising:
providing an ultrafiltration (UF) module having an inlet and a permeate outlet; and
connecting the permeate outlet to the inlet; connecting the permeate outlet to a pressure control valve;
maintaining a pressure of permeate exiting the permeate outlet at a predetermined value with the pressure control valve;
connecting a recirculation pump to the inlet of the UF module;
blending the permeate with a source of UPW to form a fluid; directing the fluid to an inlet of the recirculation pump;
connecting the permeate outlet to a demand source; and
measuring a pressure of the permeate downstream of the pressure control valve using a pressure sensor prior to blending the permeate with the source of UPW.
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