US 12,296,593 B2
Inkjet printing equipment capable of measuring droplet
Bong Moon Lee, Cheonan-si (KR)
Assigned to SEMES CO., LTD., Cheonan-si (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Nov. 25, 2022, as Appl. No. 17/994,040.
Claims priority of application No. 10-2021-0182541 (KR), filed on Dec. 20, 2021.
Prior Publication US 2023/0191786 A1, Jun. 22, 2023
Int. Cl. B41J 2/165 (2006.01); B41J 2/045 (2006.01)
CPC B41J 2/16517 (2013.01) [B41J 2/0451 (2013.01); B41J 2/04586 (2013.01)] 7 Claims
OG exemplary drawing
 
1. Inkjet printing equipment capable of measuring a droplet, the equipment comprising:
a loading section in which a process substrate is carried in or out;
a process processing section in which process processing is performed on the process substrate;
a maintenance section disposed to be adjacent to the process processing section and in which maintenance of a device is performed for the process processing;
a gantry installed above the process processing section and the maintenance section; and
a head unit configured to be movable along the gantry and discharge a solution for processing the process substrate, wherein
the process processing section includes:
a process stage configured to provide a processing space for the process substrate,
guide members disposed on both sides of the process stage,
a first gripper configured to be movable along the guide members and grip a side portion of the process substrate,
a second gripper configured to be movable along the guide members and grip a measurement substrate onto which the droplet is discharged in order to inspect the head unit,
a droplet inspection unit configured to inspect a discharge state of the droplet discharged onto the measurement substrate, and
a cleaning unit configured to remove the droplet remaining on the measurement substrate.