| CPC B25J 9/042 (2013.01) [B25J 9/043 (2013.01); B25J 9/104 (2013.01); H01L 21/67742 (2013.01); Y10S 901/15 (2013.01); Y10S 901/21 (2013.01); Y10S 901/27 (2013.01); Y10S 901/28 (2013.01); Y10S 901/29 (2013.01)] | 19 Claims |

|
1. A transport apparatus, comprising:
a drive unit having a first drive axis rotatable about a first axis of rotation and a second drive axis rotatable about a second axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis;
a robot arm comprising:
an upper arm connected to the drive unit at the first drive axis,
a forearm coupled to the upper arm, the forearm being coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, the first rotary joint being actuatable by a first band arrangement coupled to the second drive axis, and
an end effector coupled to the forearm, the end effector being coupled to the forearm at a second rotary joint and rotatable about the second rotary joint, the second rotary joint being actuatable by a second band arrangement which comprises at least one pulley with a non-circular profile and is coupled to the first rotary joint, wherein the second band arrangement is configured to provide a variable transmission ratio,
where the variable transmission ratio is selected so that the orientation of the end-effector is configured to change in a predefined manner as a function of position of the forearm relative to the upper arm, and where the variable transmission ratio is selected in a manner that allow a reference point on the end effector to follow a predetermined path with a predetermined and changed orientation of the end effector when the upper arm and the forearm are actuated accordingly.
|