US 12,296,312 B2
Complex modality reactor for materials production and synthesis
Michael W. Stowell, Sunnyvale, CA (US); Bruce Lanning, Littleton, CO (US); and Elena Rogojina, San Jose, CA (US)
Assigned to Lyten, Inc., San Jose, CA (US)
Filed by Lyten, Inc., San Jose, CA (US)
Filed on Feb. 23, 2023, as Appl. No. 18/173,322.
Application 18/173,322 is a continuation of application No. 16/751,086, filed on Jan. 23, 2020, granted, now 11,623,197.
Prior Publication US 2023/0201788 A1, Jun. 29, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B01J 19/08 (2006.01); B01D 53/32 (2006.01); B01J 19/12 (2006.01); B01J 37/34 (2006.01); H01J 37/32 (2006.01)
CPC B01J 19/087 (2013.01) [B01D 53/32 (2013.01); B01J 19/126 (2013.01); B01J 37/346 (2013.01); H01J 37/32192 (2013.01); B01D 2259/806 (2013.01); B01D 2259/818 (2013.01); B01J 2219/0869 (2013.01); B01J 2219/0894 (2013.01); B01J 2219/1218 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A plasma reactor comprising:
a first chamber having a rectangular cross-section and configured to receive microwave energy as a sinusoidal waveform;
a rectangular-to-cylindrical portion coupled to the first chamber and configured to convert the microwave energy from the sinusoidal waveform to a radial waveform;
a second chamber having a cylindrical cross-section coupled to the rectangular-to-cylindrical portion, the second chamber configured to produce a plasma plume in response to exposure of one or more process gases to the radial waveform of the microwave energy; and
a multi-flow nozzle including a first inlet and a second inlet arranged in a concentric configuration.