US 12,295,246 B2
Heater for thermal evaporator
Young Wook Park, Asan-si (KR)
Assigned to INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SUNMOON UNIVERSITY, Asan-si (KR)
Filed by INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SUNMOON UNIVERSITY, Asan-si (KR)
Filed on Apr. 19, 2022, as Appl. No. 17/723,842.
Claims priority of application No. 10-2021-0075024 (KR), filed on Jun. 9, 2021.
Prior Publication US 2022/0399502 A1, Dec. 15, 2022
Int. Cl. C23C 14/26 (2006.01); H10K 50/00 (2023.01); H10K 71/18 (2023.01)
CPC H10K 71/18 (2023.02) [H10K 50/00 (2023.02)] 7 Claims
OG exemplary drawing
 
1. A heater for a thermal evaporator, comprising a heating wire and a support,
wherein the heating wire includes:
a tunnel part that surrounds an outer surface of a container in which an organic material is accommodated and is coiled in a cylindrical shape;
a flange part that is connected to an upper end of the tunnel part and has a spiral structure in which a radius increases in a plane direction;
a first straight part extending downward from a lower end of the tunnel part; and
a second straight part extending downward from a distal end of the flange part, and
the support includes:
a ring part that supports a lower surface of the flange part; and
a plurality of bars extending downward form the ring part.