US 12,295,088 B2
Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systems
Benjamin Andrew Sams, San Diego, CA (US); Dietmar Uwe Herbert Trees, San Diego, CA (US); Theodorus Wilhelmus Driessen, San Diego, CA (US); Herman Harry Borggreve, Waalre (NL); Brandon Michael Johnson, Escondido, CA (US); and Vikas Giridhar Telkar, Escondido, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/922,056
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Apr. 26, 2021, PCT No. PCT/EP2021/060798
§ 371(c)(1), (2) Date Oct. 28, 2022,
PCT Pub. No. WO2021/233645, PCT Pub. Date Nov. 25, 2021.
Claims priority of provisional application 63/029,090, filed on May 22, 2020.
Prior Publication US 2023/0171869 A1, Jun. 1, 2023
Int. Cl. H05G 2/00 (2006.01); B05B 1/02 (2006.01); G03F 7/00 (2006.01)
CPC H05G 2/006 (2013.01) [B05B 1/02 (2013.01); G03F 7/70033 (2013.01); H05G 2/008 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A droplet generator nozzle comprising:
a metal body;
a metal fitting arranged adjacent to the metal body;
a capillary comprising a first end and a second end, the first end of the capillary disposed within the metal fitting, wherein the capillary is configured to eject initial droplets of a material from the second end of the capillary;
an electromechanical element disposed within the metal body and coupled to the first end of the capillary, wherein the electromechanical element is configured to apply a change that affects droplet generation from the capillary; and
a fastener element configured to clamp around a portion of the metal body and around the metal fitting, with the second end of the capillary protruding out from an opening in the fastener element.