| CPC H04R 7/02 (2013.01) | 20 Claims |

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1. A package structure of a micro speaker, comprising:
a substrate having a hollow chamber;
a polymer diaphragm suspended over the hollow chamber and being electrically insulating, wherein the polymer diaphragm comprises etching patterns recessed from a first surface of the polymer diaphragm and a cutting channel formed on and formed to the substrate and around the polymer diaphragm, wherein the etching patterns are smooth and symmetrical relative to an intersection in a top view;
a coil embedded in the polymer diaphragm and being separated from the etching patterns by the polymer diaphragm, wherein the coil comprises a first layer and a second layer, the first layer partially overlaps the second layer, and the first layer and the second layer are embedded in the polymer diaphragm;
at least one dielectric layer disposed between the polymer diaphragm and the substrate;
a carrier board disposed on a bottom surface of the substrate;
a first permanent magnetic element disposed on the carrier board and in the hollow chamber, wherein the first surface faces away from the first permanent magnetic element; and
a lid wrapped around the substrate and the polymer diaphragm, wherein an end of the lid exposes a portion of a top surface of the polymer diaphragm;
wherein the polymer diaphragm is made of a material different from the at least one dielectric layer.
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