US 12,294,832 B2
Microelectromechanical systems device
Yuki Ohara, Nisshin (JP); Tomoya Joke, Nisshin (JP); Tetsuya Enomoto, Nisshin (JP); Hideo Yamada, Nisshin (JP); Shuji Katakami, Fujimino (JP); Takahide Usui, Fujimino (JP); Hiroyuki Kuchiji, Fujimino (JP); and Naoki Masumoto, Fujimino (JP)
Assigned to DENSO CORPORATION, Kariya (CN); TOYOTA JIDOSHA KABUSHIKI KAISHA, Toyota (JP); MIRISE Technologies Corporation, Nisshin (JP); and Nisshinbo Micro Devices Inc., Tokyo (JP)
Filed by DENSO CORPORATION, Kariya (JP); TOYOTA JIDOSHA KABUSHIKI KAISHA, Toyota (JP); MIRISE Technologies Corporation, Nisshin (JP); and Nisshinbo Micro Devices Inc., Tokyo (JP)
Filed on Jun. 17, 2022, as Appl. No. 17/843,220.
Claims priority of application No. 2021-103498 (JP), filed on Jun. 22, 2021.
Prior Publication US 2022/0408196 A1, Dec. 22, 2022
Int. Cl. H04R 17/02 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H04R 7/06 (2006.01); H04R 7/18 (2006.01)
CPC H04R 17/02 (2013.01) [B81B 3/0072 (2013.01); B81C 1/00666 (2013.01); H04R 7/06 (2013.01); H04R 7/18 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/04 (2013.01); B81C 2201/013 (2013.01); H04R 2201/003 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A microelectromechanical systems device comprising:
a vibrator including a piezoelectric element configured to convert pressure to an electrical signal; and
a reinforcing film configured to reinforce strength of the vibrator,
wherein the vibrator further includes a groove at which a portion of the reinforcing film is disposed,
wherein the vibrator further includes:
a front surface that has an aperture of the groove; and
a boundary surface that defines a boundary of the groove,
wherein the reinforcing film is connected to the front surface and the boundary surface,
wherein the vibrator further includes a rear surface at a rear side of the vibrator facing the front surface,
wherein at least one section of the groove has a length in a lateral direction orthogonal to a thickness direction connecting the front surface and the rear surface, and
wherein the length increases in a stepwise manner toward the rear surface from the front surface.