US 12,294,797 B2
Image sensors including phase detection pixel
Hongki Kim, Hwaseong-si (KR); Minkyung Kim, Yongin-si (KR); Minkwan Kim, Hwaseong-si (KR); Minho Jang, Suwon-si (KR); and Insung Joe, Seoul (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Jun. 16, 2023, as Appl. No. 18/336,495.
Application 18/336,495 is a continuation of application No. 17/812,795, filed on Jul. 15, 2022, granted, now 11,910,112.
Application 17/812,795 is a continuation of application No. 16/986,759, filed on Aug. 6, 2020, granted, now 11,412,165, issued on Aug. 9, 2022.
Claims priority of application No. 10-2019-0131579 (KR), filed on Oct. 22, 2019.
Prior Publication US 2023/0328404 A1, Oct. 12, 2023
Int. Cl. H04N 25/704 (2023.01); H01L 27/146 (2006.01); H04N 25/11 (2023.01)
CPC H04N 25/704 (2023.01) [H01L 27/14621 (2013.01); H01L 27/14627 (2013.01); H01L 27/14629 (2013.01); H01L 27/1464 (2013.01); H01L 27/14641 (2013.01); H01L 27/14645 (2013.01); H01L 27/14685 (2013.01); H04N 25/11 (2023.01)] 20 Claims
OG exemplary drawing
 
1. An image sensor comprising:
a pixel array, the pixel array including:
a first phase detection subpixel and a second phase detection subpixel provided in a substrate and forming a first phase detection pixel, each of the first and second phase detection subpixels including a photodiode;
a first image sensing subpixel and a second image sensing subpixel provided in the substrate, each of the first and second image sensing subpixels including a photodiode;
a first micro-lens disposed on the first and second phase detection subpixels in a first direction;
a third micro-lens disposed on the first image sensing subpixel; and
a fourth micro-lens disposed on the second image sensing subpixel, and
a color filter fence disposed on an upper surface of the substrate, the color filter fence defining a plurality of color filter spaces in which a plurality of color filter layers are disposed,
wherein the color filter fence includes:
a first portion disposed on a side of the first phase detection pixel in the first direction, and
a second portion between the first image sensing subpixel and the second image sensing subpixel,
wherein the first portion has a first width in the first direction, the second portion has a second width in the first direction, and the second width is smaller than the first width.