US 12,294,352 B2
Structure, physical quantity sensor, inertial sensor, and method for manufacturing structure
Kenta Sato, Shiojiri (JP); and Masayuki Oto, Okaya (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Aug. 29, 2023, as Appl. No. 18/457,830.
Claims priority of application No. 2022-137817 (JP), filed on Aug. 31, 2022.
Prior Publication US 2024/0072765 A1, Feb. 29, 2024
Int. Cl. H03H 9/215 (2006.01); G01C 19/5628 (2012.01); G01P 15/097 (2006.01)
CPC H03H 9/215 (2013.01) [G01C 19/5628 (2013.01); G01P 15/097 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A structure of a quartz crystal substrate having a slit penetrating both main surfaces of the quartz crystal substrate and having one closed end in a longitudinal direction of the slit, which is a first direction along the main surfaces, the structure comprising:
as an inner wall of the slit,
a first side surface extending along the first direction;
a second side surface extending along the first direction;
a first end surface being part of the closed end, continuous with the first side surface, having a different orientation from the first side surface, and extending along a first crystal plane of the quartz crystal substrate; and
a second end surface being part of the closed end, continuous with the second side surface, having a different orientation from the second side surface, and extending along a second crystal plane of the quartz crystal substrate, wherein
in a plan view of the quartz crystal substrate viewed perpendicular to the main surfaces, an intersection point where a first straight line corresponding to the first end surface and a second straight line corresponding to the second end surface intersect each other is located inside the quartz crystal substrate.