US 12,294,351 B2
Acoustic wave device with mini bus bars
Akira Ochiai, Suita (JP)
Assigned to SKYWORKS SOLUTIONS, INC., Irvine, CA (US)
Filed by SKYWORKS SOLUTIONS, INC., Irvine, CA (US)
Filed on Dec. 7, 2022, as Appl. No. 18/062,665.
Claims priority of provisional application 63/292,607, filed on Dec. 22, 2021.
Prior Publication US 2023/0198497 A1, Jun. 22, 2023
Int. Cl. H03H 9/145 (2006.01); H03H 9/02 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01)
CPC H03H 9/14544 (2013.01) [H03H 9/02834 (2013.01); H03H 9/25 (2013.01); H03H 9/6483 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An acoustic wave device, comprising:
a first interdigital transducer electrode having a first bus bar and a first plurality of electrode fingers extending from the first bus bar in a first direction, the first bus bar having a width of 1 μm or less in a direction parallel to the first direction; and
a second interdigital transducer electrode having a second bus bar and a second plurality of electrode fingers extending from the second bus bar in a second direction and interleaved with the first plurality of electrode fingers, the second bus bar having a width of 1 μm or less in a direction parallel to the second direction.