US 12,293,899 B2
Plasma generation device comprising porous ceramic dielectric
Seung-hoon Lee, Changwon-si (KR); Do-geun Kim, Seoul (KR); Chang-su Kim, Changwon-si (KR); and Hun-kwan Park, Changwon-si (KR)
Assigned to KOREA INSTITUTE OF MATERIALS SCIENCE, Changwon-si (KR)
Appl. No. 17/776,291
Filed by KOREA INSTITUTE OF MATERIALS SCIENCE, Changwon-si (KR)
PCT Filed Oct. 14, 2020, PCT No. PCT/KR2020/014016
§ 371(c)(1), (2) Date May 12, 2022,
PCT Pub. No. WO2021/096077, PCT Pub. Date May 20, 2021.
Claims priority of application No. 10-2019-0145658 (KR), filed on Nov. 14, 2019.
Prior Publication US 2022/0406570 A1, Dec. 22, 2022
Int. Cl. H05H 1/24 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/32348 (2013.01) [H01J 37/32871 (2013.01); H05H 1/2425 (2021.05); H05H 1/2441 (2021.05)] 16 Claims
OG exemplary drawing
 
1. A plasma generator, comprising:
a plasma generating module comprising a first ground electrode, a high voltage electrode, and a first ceramic layer consisting of a porous ceramic dielectric formed between the first ground electrode and the high voltage electrode,
wherein the first ground electrode and the high voltage electrode are made of a grid-like or porous metal,
the porous ceramic dielectric consists of a plurality of beads comprising an antibacterial coating layer coated with an antibacterial material, and the first ceramic layer is provided with an open pore,
and a particle size of the bead matches a thickness of the first ceramic layer.