US 12,293,898 B2
Plasma ignition detection device for connection to an impedance matching circuit for a plasma generating system
Florian Maier, Pfaffenweiler (DE)
Assigned to TRUMPF HÜTTINGER GMBH + CO. KG, Freiburg (DE)
Filed by TRUMPF Hüttinger GmbH + Co. KG, Freiburg (DE)
Filed on Oct. 7, 2024, as Appl. No. 18/907,614.
Application 18/907,614 is a continuation of application No. PCT/EP2023/059194, filed on Apr. 6, 2023.
Claims priority of application No. 10 2022 108 642.9 (DE), filed on Apr. 8, 2022.
Prior Publication US 2025/0104973 A1, Mar. 27, 2025
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32183 (2013.01) [H01J 37/3299 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A plasma ignition detection device for connecting to an impedance matching circuit for a plasma generation system, the plasma ignition detection device configured to:
process first time-variant measured values, from a first predetermined location of the impedance matching circuit, wherein an applied first reactive and/or active power is capable of being determined from the first time-variant measured values;
process second time-variant values which are associated with a second location of the impedance matching circuit, wherein the second location is different to the first predetermined location, wherein an applied second reactive and/or active power is capable of being determined from the second time-variant values;
determine a first time-variant variable from the first time-variant measured values;
determine a second time-variant variable from the second time-variant values; and
generate an output signal which describes a plasma state, depending on the first and second time-variant variables.