US 12,293,897 B2
Radio frequency diverter assembly enabling on-demand different spatial
Kartik Ramaswamy, San Jose, CA (US); Yue Guo, Redwood City, CA (US); A N M Wasekul Azad, Santa Clara, CA (US); Yang Yang, San Diego, CA (US); and Nicolas J. Bright, Arlington, WA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 28, 2023, as Appl. No. 18/115,537.
Prior Publication US 2024/0290578 A1, Aug. 29, 2024
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32183 (2013.01) [H01J 37/32091 (2013.01); H01J 37/321 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A radio frequency (RF) diverter assembly, comprising:
a first hybrid coupler having four RF ports;
a second hybrid coupler having four RF ports; wherein
a first RF port of the first hybrid coupler is coupled to a first RF port of the second hybrid coupler, and
a second RF port of the first hybrid coupler is coupled to a second RF port of the second hybrid coupler;
a first controllable impedance circuit having a first node coupled to the first RF ports of the first and second hybrid couplers and a second node coupled to an equipment common,
a second controllable impedance circuit having a first node coupled to the second RF ports of the first and second hybrid couplers and a second node coupled to the equipment common; and
the first and second controllable impedance circuits have a first impedance at a frequency when configured to be parallel resonant at the frequency, and a second impedance when configured to not be parallel resonant at the frequency, wherein the first impedance is greater than the second impedance.