US 12,293,895 B2
Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods
Eugen Foca, Ellwangen (DE); Amir Avishai, Pleasanton, CA (US); Thomas Korb, Schwäbisch Gmünd (DE); and Daniel Fischer, Dresden (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Oct. 12, 2023, as Appl. No. 18/379,400.
Application 18/379,400 is a division of application No. 17/542,773, filed on Dec. 6, 2021, granted, now 11,810,749.
Prior Publication US 2024/0038482 A1, Feb. 1, 2024
Int. Cl. H01J 37/147 (2006.01); H01J 37/10 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/1474 (2013.01) [H01J 37/10 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A method of recording a plurality of images representing different regions of interest of a sample, the method comprising:
recording a plurality of images representing a plurality of different regions of interest on a sample, comprising:
scanning a charged particle beam over a plurality of scan regions including at least four scan regions,
wherein each of the regions of interest comprises a plurality of the scan regions,
wherein each two scan regions to be scanned in succession are separated by at least a first minimum distance amounting to at least 100 nm, and
wherein each two scan regions to be scanned in succession belong to different ones of the regions of interest.