US 12,293,492 B2
Substrate processing apparatus and monitoring method in substrate processing apparatus
Shinji Shimizu, Kyoto (JP); Ryo Yamada, Kyoto (JP); Tatsuya Masui, Kyoto (JP); Yuichi Deba, Kyoto (JP); and Miwa Miyawaki, Kyoto (JP)
Assigned to SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed on Jan. 6, 2023, as Appl. No. 18/151,123.
Claims priority of application No. 2022-029224 (JP), filed on Feb. 28, 2022.
Prior Publication US 2023/0274397 A1, Aug. 31, 2023
Int. Cl. G06T 5/70 (2024.01); B08B 3/04 (2006.01); B08B 3/08 (2006.01); B08B 13/00 (2006.01); G06T 7/00 (2017.01)
CPC G06T 5/70 (2024.01) [B08B 3/048 (2013.01); B08B 3/08 (2013.01); B08B 13/00 (2013.01); G06T 7/001 (2013.01); G06T 2207/30108 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A substrate processing apparatus configured to collectively process a plurality of substrates by immersing the plurality of substrates in a processing liquid, comprising:
a processing tank that stores the processing liquid;
a lifter configured to move the plurality of substrates up and down, between an up position which is a delivery position above the processing tank for the substrates and a down position which is a processing position inside the processing tank for the substrates,
a camera provided vertically above the processing tank and figured to generate a plurality of items of captured image data obtained by capturing images inside of the processing tank in a state where the processing liquid is stored in the processing tank;
a controller configured to generate smoothed image data obtained by smoothing a brightness distribution of the images caused by waving of a liquid surface of the processing liquid, said smoothing being based on integration of the plurality of items of captured image data, and said controller being configured to monitor the inside of the processing tank based on the smoothed image data, the controller performing the monitoring in a state when the lifter is at the delivery position; and wherein
a storage device is configured to store reference image data obtained based on integration of a plurality of items of normal image data generated by the camera capturing the inside of the processing tank in a normal condition, wherein the controller is configured to determine whether there is an abnormality in the processing tank based on a comparison between the smoothed image data and the reference image data.