| CPC G03F 7/70633 (2013.01) [G03F 7/70625 (2013.01); G03F 7/70683 (2013.01); H01L 23/544 (2013.01)] | 20 Claims |
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1. A device, comprising:
a diffraction-based overlay (DBO) mark including:
an upper left portion, a lower right portion, a lower left portion, and an upper right portion, the upper left portion having an upper left corner, the lower right portion having a lower right corner, the lower left portion including a lower left corner, and the upper right portion includes an upper right corner;
a first lane extending in a first direction between the upper left portion and the upper right portion, and the first lane extending in the first direction between the lower left portion and the lower right portion;
a second lane extending in a second direction between the upper left portion and the lower left portion, and the second lane extending in the second direction between the upper right portion and the lower right portion; and
a center defined at a location at which the first lane and the second lane intersect with each other, the center is surrounded by a plurality of corners of the upper left portion, the lower left portion, the upper right portion, and the lower right portion, each respective corner of the plurality of corners is opposite to a corresponding one of the upper left portion, the lower left portion, the upper right portion, and the lower right portion;
a first calibration mark at the center, and the first calibration mark is in close proximity to the plurality of corners;
a first line and a second line opposite to each other about the upper left portion, the lower right portion, the lower left portion, and the upper right portion, the first line and the second line extending in the first direction;
a third line and a fourth line opposite to each other about the upper left portion, the lower right portion, the lower left portion, and the upper right portion, the third line and the fourth line extending in the second direction;
a periphery defined by the first line, the second line, the third line, and the fourth line;
a plurality of second calibration marks at the periphery, a first one of the plurality of second calibration marks is in close proximity to the upper left corner, a second one of the plurality of second calibration marks is in close proximity to the lower right corner, a third one of the plurality of second calibration marks in close proximity to the lower left corner, and a fourth one of the plurality of second calibration marks in close proximity to the upper right corner;
wherein a first portion of the first lane that extends from the first calibration mark to the third line, the first portion of the first lane is void of respective calibration marks, and a second portion of the first lane that extends from the first calibration mark to the fourth line, the second portion of the first line is void of respective calibration marks,
wherein a first portion of the second lane that extends from the first calibration mark to the first line, the first portion of the second lane is void of respective calibration marks, and a second portion of the second lane that extends from the first calibration mark to the second line, the second portion is void of respective calibration marks,
wherein the plurality of second calibration marks are at intersections between respective ones of the first, second, third, and fourth lines, and
wherein respective portions of the first, second, third, and fourth lines are void of respective calibration marks between respective ones of the first one, the second one, the third one, and the fourth one of the plurality of second calibration marks.
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