US 12,292,626 B2
Devices and methods for low voltage optical modulation
Yuping Huang, Norwood, NJ (US); Yong Meng Sua, Fort Lee, NJ (US); Mingwei Jin, Jersey City, NJ (US); and Jiayang Chen, Jersey City, NJ (US)
Assigned to The Trustees of the Stevens Institute of Technology, Hoboken, NJ (US)
Appl. No. 17/923,554
Filed by THE TRUSTEES OF THE STEVENS INSTITUTE OF TECHNOLOGY, Hoboken, NJ (US)
PCT Filed May 6, 2021, PCT No. PCT/US2021/031177
§ 371(c)(1), (2) Date Nov. 4, 2022,
PCT Pub. No. WO2021/226395, PCT Pub. Date Nov. 11, 2021.
Claims priority of provisional application 63/021,012, filed on May 6, 2020.
Prior Publication US 2023/0185119 A1, Jun. 15, 2023
Int. Cl. G02B 27/28 (2006.01); G02F 1/03 (2006.01); G02F 1/035 (2006.01); G02F 1/225 (2006.01); B82Y 20/00 (2011.01); G02F 1/31 (2006.01)
CPC G02F 1/0316 (2013.01) [G02B 27/286 (2013.01); G02F 1/0305 (2013.01); G02F 1/035 (2013.01); G02F 1/2257 (2013.01); B82Y 20/00 (2013.01); G02B 2207/101 (2013.01); G02F 1/31 (2013.01); G02F 2203/15 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An electro-optical modulator, comprising:
a base substrate;
a waveguide having a first surface proximate said base substrate and a second surface opposite said first surface and remote from said base substrate, said waveguide including a ledge projecting from said second surface thereof;
a first electrode, including a first section in contact with said second surface of said waveguide to one side of said ledge thereof, a first joint at an end of said first section proximate said ledge of said waveguide, and a second section extending from said first joint and being offset relative to said first section such that said second section has a terminal end located a first spaced distance from said second surface of said waveguide and a second spaced distance from said ledge of said waveguide;
a second electrode, including a third section in contact with said second surface of said waveguide to an opposite side of said ledge thereof, a second joint at an end of said third section proximate said ledge of said waveguide, and a fourth section extending from said second joint and being offset relative to said third section such that said fourth section has a terminal end located a third spaced distance from said second surface of said waveguide and a fourth spaced distance from said ledge of said waveguide, said fourth section of said second electrode being spaced from said second section of said first electrode by a fifth spaced distance, and said second joint of said second electrode being spaced from said first joint of said first electrode by a sixth spaced distance, which is different than said fifth spaced distance;
a cladding layer having a first portion interposed between said first surface of said waveguide and said base substrate and a second portion interposed between said second surface of said waveguide and said second and fourth sections of said first and second electrodes, respectively;
a first capacitor established by said first and second joints of said first and second electrodes, respectively, upon application of an electrical potential to at least one of said first and second electrodes; and
a second capacitor established by said second and said fourth sections of said first and second electrodes, respectively, upon application of an electrical potential to at least one of said first and second electrodes.