US 12,292,567 B2
Microelectromechanical mirror device with compensation of planarity errors
Nicolo′ Boni, Albino (IT); Roberto Carminati, Piancogno (IT); and Massimiliano Merli, Pavia (IT)
Assigned to STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed by STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed on Sep. 2, 2021, as Appl. No. 17/465,329.
Claims priority of application No. 102020000023110 (IT), filed on Sep. 30, 2020.
Prior Publication US 2022/0099959 A1, Mar. 31, 2022
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); G02B 26/10 (2006.01)
CPC G02B 26/0858 (2013.01) [B81B 3/0021 (2013.01); G02B 26/105 (2013.01); B81B 2201/042 (2013.01)] 38 Claims
OG exemplary drawing
 
1. A microelectromechanical systems (MEMS) mirror device, comprising:
a supporting frame comprised of semiconductor material;
a plate comprised of semiconductor material, the plate connected to the supporting frame so as to be orientable around at least one rotation axis;
a reflective layer on a first region of the plate; and
a piezoelectric actuation structure extending on a second region of the plate adjacent to the reflective layer and configured to apply forces that modify a curvature of the plate.