US 12,292,566 B2
Laser systems and optical devices for laser beam shaping
David E. Hargis, San Diego, CA (US); John O'Shaughnessy, Carlsbad, CA (US); and Jeffrey M. Bendick, Carlsbad, CA (US)
Assigned to IDEX HEALTH & SCIENCE LLC, Rohnert Park, CA (US)
Filed by IDEX HEALTH & SCIENCE LLC, Rohnert Park, CA (US)
Filed on Jul. 30, 2021, as Appl. No. 17/390,348.
Claims priority of provisional application 63/059,912, filed on Jul. 31, 2020.
Prior Publication US 2022/0163786 A1, May 26, 2022
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); G02B 26/10 (2006.01)
CPC G02B 26/085 (2013.01) [B81B 3/0067 (2013.01); G02B 26/105 (2013.01); B81B 2201/042 (2013.01)] 30 Claims
OG exemplary drawing
 
1. An illumination system, comprising:
at least one laser configured to emit light;
a microelectromechanical system (MEMS) mirror positioned to receive light emitted from the at least one laser, the MEMS mirror driven to provide a moving light beam moving in a first angular range ar1 along a first direction and at a certain frequency f1;
a collimating optical element configured to receive the moving light beam from the MEMS mirror and output a light beam that is more collimated than the light received from the MEMS mirror;
a cylindrical lens array (CLA) positioned to receive the light beam from the collimating optical element and configured to alter the distribution of light received from the collimating optical element and output a substantially flat-top distribution of light; and
an objective lens system positioned to receive the light from the CLA and propagate an output beam to a sample plane, the output beam being a flat top line beam.