US 12,292,565 B2
MEMS based light deflecting device and method
Shlomi Efrati, Mevasseret Zion (IL); Arkady Bronfman, Beer-Sheva (IL); Semion Kofman, Holon (IL); Fares Marjieh, Jaffa-Nazareth (IL); Yaron Zimmerman, Kiryat Tivon (IL); and Boris Greenberg, Tel Aviv (IL)
Assigned to EYEWAY VISION LTD., Or Yehuda (IL)
Appl. No. 17/604,617
Filed by EyeWay Vision Ltd., Or Yehuda (IL)
PCT Filed Apr. 16, 2020, PCT No. PCT/IL2020/050443
§ 371(c)(1), (2) Date Oct. 18, 2021,
PCT Pub. No. WO2020/212984, PCT Pub. Date Oct. 22, 2020.
Claims priority of application No. 266127 (IL), filed on Apr. 18, 2019.
Prior Publication US 2022/0179195 A1, Jun. 9, 2022
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); G02B 26/10 (2006.01)
CPC G02B 26/0841 (2013.01) [B81B 3/0086 (2013.01); G02B 26/105 (2013.01); B81B 2201/03 (2013.01)] 14 Claims
OG exemplary drawing
 
7. A light deflecting system comprising:
at least one comb type MEMS actuators carrying a light deflecting surface and configured for varying orientation of the light deflecting surface by variation in a position of the at least one comb type MEMS actuator in response to voltage profile of a control signal applied thereon,
an electric circuit comprising a driver unit configured for providing, via a first electrical connection, a control signal having a first characteristic frequency range exceeding resonance frequency of a mechanical system defined by the at least one comb type MEMS actuator carrying the light deflecting surface, and providing, via a second electrical connection to said at least one comb type MEMS actuator, a carrier signal on top of a voltage profile of the control signal, the carrier signal having a second characteristic frequency range higher than a maximal bandwidth of said first frequency of the control signal, and for monitoring orientation of the at least one comb type MEMS actuators by monitoring amplitude of said carrier signal, being affected by an impedance of the at least one comb type MEMS actuator to generate a sensing signal whose amplitude is affected by an impedance of the at least one comb type MEMS actuator having said second characteristic frequency of the carrier signal and amplitude of the carrier signal affected by the impedance change of the at least one comb type MEMS actuator carrying the light deflecting surface; and
a control unit comprising at least one processing utility and memory utility, said memory utility being preloaded with data indicative of an actuator response model indicating estimated response of the at least one comb type MEMS actuator in response to a control signal of a given profile, said at least one processing utility being configured and operable for receiving, from the electric circuit, input data indicative of the sensing signal being indicative of impedance of the at least one comb type MEMS actuator carrying the light deflecting surface, and for processing said input data in accordance with said actuator response model for generating data on the control signal to provide desired position of the at least one comb type MEMS actuator.