US 12,292,504 B2
Displacement sensor
Sohei Kanoda, Osaka (JP); Shinichiro Otsu, Osaka (JP); and Choryon Oh, Osaka (JP)
Assigned to KEYENCE CORPORATION, Osaka (JP)
Filed by Keyence Corporation, Osaka (JP)
Filed on Mar. 9, 2021, as Appl. No. 17/195,689.
Claims priority of application No. 2020-071363 (JP), filed on Apr. 10, 2020.
Prior Publication US 2021/0318437 A1, Oct. 14, 2021
Int. Cl. G01S 17/42 (2006.01); G01C 3/08 (2006.01); G01S 7/48 (2006.01); G01S 7/481 (2006.01)
CPC G01S 17/42 (2013.01) [G01C 3/08 (2013.01); G01S 7/4808 (2013.01); G01S 7/481 (2013.01); G01S 7/4813 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A displacement sensor comprising:
a light projecting element that projects light;
a metal housing including a transmission window that transmits light;
a first holder bonded to a first flat surface of an optical base, that holds the light projecting element, the optical base being a part of the metal housing, the first flat surface corresponding to an adjustable range in which the first holder is positioned;
a light projecting lens fixed to the optical base, condenses the light projected from the light projecting element for forming a light projected spot, and causes the light to impinge on a detection region through the transmission window;
a light receiving lens fixed to the optical base and condenses light from the detection region to form an image of the light projected spot in the detection region;
an imaging element that captures the image of the light projected spot in the detection region formed by the light receiving lens and generates a light receiving signal in accordance with intensity of received light;
a second holder bonded to a second surface of the optical base that holds the imaging element, the second flat surface corresponding to an adjustable range in which the second holder is positioned; and
a measuring part that identifies a position of the light projected spot in the imaging element on the basis of the light receiving signal from the imaging element and measures displacement of a to-be-detected object on the basis of the position of the light projected spot identified, wherein
the light projecting element and the imaging element are insulated from the optical base by the first holder and the second holder each made of a ceramic material, and
the first holder and the second holder are individually bonded to the optical base.