US 12,292,484 B2
Method and system for thermal control of devices in an electronics tester
Jovan Jovanovic, Santa Clara, CA (US); Kenneth W. Deboe, Santa Clara, CA (US); and Steven C. Steps, Saratoga, CA (US)
Assigned to AEHR TEST SYSTEMS, Fremont, CA (US)
Filed by AEHR TEST SYSTEMS, Fremont, CA (US)
Filed on Sep. 5, 2024, as Appl. No. 18/825,970.
Application 17/532,298 is a division of application No. 16/576,555, filed on Sep. 19, 2019, granted, now 11,209,497, issued on Dec. 28, 2021.
Application 16/576,555 is a division of application No. 15/400,771, filed on Jan. 6, 2017, granted, now 10,466,292, issued on Nov. 5, 2019.
Application 18/825,970 is a continuation of application No. 18/648,873, filed on Apr. 29, 2024.
Application 18/648,873 is a continuation of application No. 17/532,298, filed on Nov. 22, 2021, granted, now 12,007,451, issued on Jun. 11, 2024.
Claims priority of provisional application 62/276,746, filed on Jan. 8, 2016.
Prior Publication US 2024/0426939 A1, Dec. 26, 2024
Int. Cl. G01R 31/50 (2020.01); G01R 1/04 (2006.01); G01R 31/00 (2006.01); G01R 31/26 (2020.01); G01R 31/28 (2006.01); H01L 21/324 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC G01R 31/50 (2020.01) [G01R 1/0491 (2013.01); G01R 31/003 (2013.01); G01R 31/2831 (2013.01); G01R 31/2875 (2013.01); H01L 21/324 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/68785 (2013.01); H01L 22/26 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A tester apparatus, comprising:
a frame;
a plurality of doors mounted to the frame, wherein each door is movable between a respective closed position that disallows movement of a respective substrate, having a microelectronic circuit and substrate terminals connected to the respective microelectronic circuit, into or out of the frame, and a respective open position that allows movement of a respective substrate into or out of the frame;
an electrical tester;
a portable cartridge that includes:
a portable cartridge body including first and second components for holding the substrate therebetween;
a plurality of portable cartridge contacts on the second component, the portable cartridge contacts matching the substrate terminals for making contact to the substrate terminals of the substrate connected to a microelectronic circuit; and
a first electrical interface on the portable cartridge body and connected to the portable cartridge contacts, wherein the portable cartridge body is receivable when a first door of the doors is in the respective open position to be held by the frame and being removable from the frame when the first door is in the respective open position; and
a second electrical interface on the frame, the second electrical interface being connected to the first electrical interface when the portable cartridge is held by the frame, and being disconnected from the first electrical interface when the portable cartridge body is removed from the frame, wherein
the electrical tester is connected through the second electrical interface, the first electrical interface, and the portable cartridge contacts to the substrate terminals so that signals are transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit.