US 12,292,457 B2
Flexible membrane adapted to carry high-frequency (RF) power signals and corresponding probe card for the high-frequency (RF) power test of electronic devices
Flavio Maggioni, Cernusco Lombardone (IT)
Assigned to TECHNOPROBE S.P.A., Cernusco Lombardone (IT)
Appl. No. 18/254,044
Filed by TECHNOPROBE S.P.A., Cernusco Lombardone (IT)
PCT Filed Nov. 18, 2021, PCT No. PCT/EP2021/082197
§ 371(c)(1), (2) Date May 23, 2023,
PCT Pub. No. WO2022/112100, PCT Pub. Date Jun. 2, 2022.
Claims priority of application No. 102020000028370 (IT), filed on Nov. 25, 2020.
Prior Publication US 2023/0408548 A1, Dec. 21, 2023
Int. Cl. G01R 1/067 (2006.01); G01R 1/073 (2006.01); H05K 1/14 (2006.01); H05K 3/32 (2006.01); H05K 3/40 (2006.01)
CPC G01R 1/0735 (2013.01) [G01R 1/06772 (2013.01); H05K 1/147 (2013.01); H05K 3/326 (2013.01); H05K 3/4007 (2013.01); H05K 2201/0367 (2013.01)] 33 Claims
OG exemplary drawing
 
1. A flexible membrane adapted to carry high-frequency power signals, comprising:
a central portion provided with a plurality of contact pads;
a peripheral portion provided with a plurality of contact structures;
an intermediate portion arranged and connected between the central portion and the peripheral portion; and
a plurality of conductive tracks realised in the flexible membrane,
wherein the plurality of contact pads are adapted to electrically connect a plurality of micro contact probes and the plurality of contact structures being adapted to electrically connect a support plate,
wherein each of the conductive tracks are adapted to electrically connect one of the contact pads with one of the contact structures, the flexible membrane being divided into a first area having a first total thickness and into a second area having a second total thickness,
wherein the first area is contiguous and adjacent to the second area, and
wherein the first total thickness is less than or equal to 75 μm, the second total thickness is greater than the first total thickness, and the first area of the flexible membrane extending in correspondence of the central portion and comprising the plurality of contact pads.