US 12,292,427 B2
Gas sensor device with high sensitivity at low temperature and method of fabrication thereof
Nohora Caicedo Panqueva, Esch-sur-Alzette (LU); Damien Lenoble, Wellin (BE); Renaud Leturcq, Luxembourg (LU); and Jean-Sébastien Thomann, Gorcy (FR)
Assigned to LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST), Esch-sur-Alzette (LU)
Appl. No. 16/645,579
Filed by LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST), Esch-sur-Alzette (LU)
PCT Filed Sep. 19, 2018, PCT No. PCT/EP2018/075370
§ 371(c)(1), (2) Date Mar. 9, 2020,
PCT Pub. No. WO2019/057786, PCT Pub. Date Mar. 28, 2019.
Claims priority of application No. 100442 (LU), filed on Sep. 19, 2017.
Prior Publication US 2020/0300825 A1, Sep. 24, 2020
Int. Cl. G01N 27/12 (2006.01); G01N 27/403 (2006.01); G01N 33/00 (2006.01)
CPC G01N 33/004 (2013.01) [G01N 27/127 (2013.01); G01N 27/403 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A method for producing a gas sensor comprising a step of providing a substrate with two coplanar electrodes and a step of forming a ZnO nanowires network on the two coplanar electrodes, wherein the step of forming the ZnO nanowires network on the two coplanar electrodes is performed as follows:
a) synthesizing ZnO nanowires with a liquid phase sequential growth method;
b) dispersing the synthesized ZnO nanowires in a solvent to form a solution;
c) drop casting the solution containing the solvent and the ZnO nanowires on the two coplanar electrodes; and
d) drying the solution at a temperature inferior to 85° C. without annealing;
wherein the steps of drop casting and of drying are repeated together at least one time.