US 12,292,396 B2
X-ray analysis system and method with multi-source design
Xuena Zhang, ShenZhen (CN); Feng Hong, ShenZhen (CN); and Cuihuan Wang, ShenZhen (CN)
Assigned to SHENZHEN ANGSTROM EXCELLENCE TECHNOLOGY CO. LTD, Shenzhen (CN)
Filed by Shenzhen Angstrom Excellence Technology Co. Ltd, ShenZhen (CN)
Filed on Jan. 23, 2023, as Appl. No. 18/158,223.
Claims priority of application No. 202210103584.X (CN), filed on Jan. 25, 2022.
Prior Publication US 2023/0236143 A1, Jul. 27, 2023
Int. Cl. G01N 23/201 (2018.01); G01N 23/207 (2018.01); G01N 23/2206 (2018.01); G01N 23/223 (2006.01)
CPC G01N 23/2206 (2013.01) [G01N 23/201 (2013.01); G01N 23/207 (2013.01); G01N 23/223 (2013.01); G01N 2223/052 (2013.01); G01N 2223/054 (2013.01); G01N 2223/056 (2013.01); G01N 2223/071 (2013.01); G01N 2223/076 (2013.01); G01N 2223/1016 (2013.01); G01N 2223/3307 (2013.01); G01N 2223/6116 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An X-ray analysis system, comprising:
a ray source comprising a plurality of ray generating devices configured to generate a ray;
a detector configured to detect a signal generated due to an analyzed object being irradiated by the ray from the ray source; and
a controller configured to control the ray source, so that two or more ray generating devices in the ray source simultaneously generate corresponding rays to irradiate the analyzed object,
wherein the detector comprises at least one of:
a fluorescence detector configured to detect a fluorescence emitted by the analyzed object due to the analyzed object being irradiated by the ray from at least one of the two or more ray generating devices to perform an X-ray fluorescence (XRF) analysis;
a reflected light detector configured to detect a reflected light obtained by the analyzed object reflecting the ray of at least one of the two or more ray generating devices to perform an X-ray reflection (XRR) analysis;
a diffracted light detector configured to detect a diffracted light obtained by the analyzed object diffracting the ray of at least one of the two or more ray generating devices to perform an X-ray diffraction (XRD) analysis; and
a scattered light detector configured to detect a scattered light obtained by the analyzed object scattering the ray of at least one of the two or more ray generating devices to perform a small angle X-ray scattering (SAX) analysis; and
wherein the detector comprises the fluorescence detector and the rays of the two or more ray generating devices are configured to be incident onto the analyzed sample at an incidence angle less than a critical angle, and the fluorescence detector is configured to directly face the analyzed sample to perform a total reflection XRF (TXRF) analysis.