US 12,292,387 B2
Apparatus and method for inspecting laser defect inside of transparent material
Chong Pyung An, Painted Post, NY (US); En Hong, Painted Post, NY (US); Tian Huang, San Jose, CA (US); Yuhui Jin, Painted Post, NY (US); Philip Robert LeBlanc, Corning, NY (US); and Garrett Andrew Piech, Corning, NY (US)
Assigned to Corning Incorporated, Corning, NY (US)
Appl. No. 17/928,005
Filed by CORNING INCORPORATED, Corning, NY (US)
PCT Filed May 25, 2021, PCT No. PCT/US2021/033996
§ 371(c)(1), (2) Date Nov. 28, 2022,
PCT Pub. No. WO2021/247281, PCT Pub. Date Dec. 9, 2021.
Claims priority of provisional application 63/033,921, filed on Jun. 3, 2020.
Prior Publication US 2023/0221261 A1, Jul. 13, 2023
Int. Cl. G01N 21/88 (2006.01); G01N 21/958 (2006.01)
CPC G01N 21/8806 (2013.01) [G01N 21/8851 (2013.01); G01N 21/958 (2013.01); G01N 2021/8822 (2013.01); G01N 2021/8887 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for inspecting a transparent workpiece comprising: directing light from an illumination source onto a plurality of defects formed in the transparent workpiece, wherein the plurality of defects extend in a defect direction, wherein the transparent workpiece comprises a first surface and a second surface; detecting a scattering image signal from light scattered by the plurality of defects using an imaging system, wherein an imaging axis of the imaging system extends at a non-zero imaging angle relative to the defect direction, wherein entireties at least a subset of the plurality of defects are within a depth of field of the imaging system; and generating a three-dimensional image of at least one of the plurality of defects based on the scattering signal;
wherein the defect comprises a damage pattern that varies as a function of depth in the transparent workpiece and wherein the damage pattern comprises a first portion extending from the first surface, a second portion extending from the second surface, and a third portion extending between the first and second portions, wherein the transparent workpiece has higher levels of modification in the first and second portions as compared to the third portion, wherein the quantitative characteristic of the defect comprises a ratio of a length of the first portion to a length of the second portion.