US 12,292,375 B2
Analysis device
Ryosuke Imai, Osaka (JP); and Kenichiro Hirose, Osaka (JP)
Assigned to KEYENCE CORPORATION, Osaka (JP)
Filed by Keyence Corporation, Osaka (JP)
Filed on May 9, 2023, as Appl. No. 18/144,875.
Application 18/144,875 is a continuation of application No. 17/466,288, filed on Sep. 3, 2021, granted, now 11,686,668.
Claims priority of application No. 2021-077183 (JP), filed on Apr. 30, 2021.
Prior Publication US 2023/0280267 A1, Sep. 7, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01N 21/25 (2006.01); G01N 21/31 (2006.01); G02B 5/10 (2006.01); G02B 19/00 (2006.01)
CPC G01N 21/255 (2013.01) [G01N 21/31 (2013.01); G02B 5/10 (2013.01); G02B 19/0019 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An analysis device having an electromagnetic wave emitter that emits a primary electromagnetic wave for analysis of an analyte, a collection head that collects the primary electromagnetic wave from the electromagnetic wave emitter to irradiate the sample, and collects a secondary electromagnetic wave generated on the analyte in response to the emission of the primary electromagnetic wave from the electromagnetic wave emitter, the primary electromagnetic wave being irradiated to the sample via the collection head, and collects a reflection light reflected by the analyte, a detector that receives the secondary electromagnetic wave generated on the analyte and collected by the collection head and generates an intensity distribution spectrum which is an intensity distribution for each wavelength of the secondary electromagnetic wave, and a processor that performs a component analysis of the analyte based on the intensity distribution spectrum generated by the detector, comprising:
a coaxial illuminator that emits illumination light;
a side illuminator which is arranged to surround the collection head and emits illumination light from obliquely above the analyte;
a camera that collects the reflection light reflected by the analyte via the collection head, and detects a light reception amount of the collected reflection light;
a spectroscopic element that receives the secondary electromagnetic wave collected by the collection head and the reflection light collected by the collection head via the common optical path, and disperse the common optical path so as to guide the secondary electromagnetic wave to the detector and guide the reflection light to the camera;
an observation optical system which includes a second coaxial illuminator that emits illumination light, a second side illuminator that emits illumination light from obliquely above the analyte, an objective lens that collects reflection light from the analyte, and a second camera that collects the reflection light collected by the objective lens and detects a light reception amount of the reflection light to capture an image of the analyte;
an illumination setting section that sets an illumination condition of at least one of the second coaxial illuminator and the second side illuminator, and stores the illumination condition in a storage device;
an illumination controller that reads the illumination condition set by the illumination setting section from the storage device, and controls at least one of the coaxial illuminator and the side illuminator so as to reflect the read illumination condition,
wherein the processor is configured to
capture a first image of the analyte with the second camera,
capture a second image of the analyte with the camera under the same illumination condition as the first image using the read illumination condition,
perform the component analysis of the analyte based on the peak position and the peak height of the intensity distribution spectrum, which is the intensity distribution for each wavelength of the secondary electromagnetic wave, and
generate an image data of the analyte based on the light reception amount of the collected reflection light detected by the camera.