US 12,292,336 B2
Bolometer having an alignment layer of carbon nanotubes and method for manufacturing same
Ryota Yuge, Tokyo (JP); and Noriyuki Tonouchi, Tokyo (JP)
Assigned to NEC CORPORATION, Tokyo (JP)
Appl. No. 17/612,325
Filed by NEC Corporation, Tokyo (JP)
PCT Filed May 21, 2020, PCT No. PCT/JP2020/020123
§ 371(c)(1), (2) Date Nov. 18, 2021,
PCT Pub. No. WO2020/235636, PCT Pub. Date Nov. 26, 2020.
Claims priority of application No. 2019-096953 (JP), filed on May 23, 2019.
Prior Publication US 2022/0221346 A1, Jul. 14, 2022
Int. Cl. G01J 5/22 (2006.01)
CPC G01J 5/22 (2013.01) 14 Claims
OG exemplary drawing
 
1. A bolometer comprising:
a substrate;
a first electrode on the substrate;
a second electrode spaced from the first electrode on the substrate; and
a carbon nanotube film electrically connected to the first electrode and the second electrode, wherein
the carbon nanotube film consists of carbon nanotubes and comprises 90% by mass or more of semiconducting carbon nanotubes based on the total amount of carbon nanotubes,
a change in electrical resistance of the carbon nanotube film is caused by a temperature change, and
the carbon nanotube film has an alignment satisfying:
fx/fy≥2
where an integrated value f of amplitudes of frequencies from −1 μm−1 to +1 μm−1 in one direction from the center is calculated in an image obtained by performing two-dimensional fast Fourier transform processing on an SEM image of the carbon nanotube film, and an integrated value for a direction x in which the integrated value f becomes maximum is defined as fx and an integrated value for a direction y perpendicular to the direction x is defined as fy.