US 12,292,330 B2
Spectrometry apparatus
Kaifeng Zhang, Tokyo (JP); Masahiro Watanabe, Tokyo (JP); and Takenori Hirose, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Apr. 6, 2023, as Appl. No. 18/131,508.
Claims priority of application No. 2022-068154 (JP), filed on Apr. 18, 2022.
Prior Publication US 2023/0332950 A1, Oct. 19, 2023
Int. Cl. G01J 3/10 (2006.01); G01J 3/02 (2006.01)
CPC G01J 3/021 (2013.01) [G01J 3/0208 (2013.01); G01J 3/0229 (2013.01); G01J 3/10 (2013.01); G01J 2003/102 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A spectrometry apparatus comprising:
a stage on which a sample is placed;
an electromagnetic source that emits an electromagnetic wave;
one or a plurality of optical elements that transform a spatial energy distribution of the electromagnetic wave into multiple divisions and emit the electromagnetic wave; and
a reflective objective lens that collects the electromagnetic wave after the transformation of the spatial energy distribution and irradiates the sample with the collected electromagnetic wave, the reflective objective lens including a first reflection mechanism and a second reflection mechanism, which are independent from the one or plurality of optical elements,
wherein the reflective objective lens includes a support body having multiple arms disposed radially that support the first reflection mechanism,
wherein the one or plurality of optical elements transform the spatial energy distribution of the electromagnetic wave into the multiple divisions that correspond to the multiple arms of the support body.