US 12,292,286 B2
Microelectromechanical gyroscope and method for compensating an output thermal drift in a microelectromechanical gyroscope
Luca Guerinoni, Alzano Lombardo (IT); and Luca Giuseppe Falorni, Limbiate (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on Jul. 17, 2023, as Appl. No. 18/353,692.
Application 18/353,692 is a continuation of application No. 17/524,609, filed on Nov. 11, 2021, granted, now 11,740,088.
Claims priority of application No. 102020000028757 (IT), filed on Nov. 27, 2020.
Prior Publication US 2023/0358540 A1, Nov. 9, 2023
Int. Cl. G01C 25/00 (2006.01); G01C 19/5712 (2012.01)
CPC G01C 19/5712 (2013.01) [G01C 25/005 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device, comprising:
a support structure having a surface;
an anchor extending from the support structure;
a sensing mass coupled to the support structure by one or more flexures and overlying the surface of the support structure;
a fulcrum coupled to an end of the anchor spaced apart from the surface of the support structure;
a calibration structure having a calibration plate coupled to the fulcrum and overlapping the sensing mass; and
a gap extending from the calibration plate to the sensing mass.