CPC G01C 19/5712 (2013.01) [G01C 25/005 (2013.01)] | 20 Claims |
1. A device, comprising:
a support structure having a surface;
an anchor extending from the support structure;
a sensing mass coupled to the support structure by one or more flexures and overlying the surface of the support structure;
a fulcrum coupled to an end of the anchor spaced apart from the surface of the support structure;
a calibration structure having a calibration plate coupled to the fulcrum and overlapping the sensing mass; and
a gap extending from the calibration plate to the sensing mass.
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