CPC F28D 15/0233 (2013.01) [F28D 15/04 (2013.01); H01L 23/427 (2013.01); H05K 7/20 (2013.01)] | 11 Claims |
1. A heat dissipation member comprising:
an intermediate member with a plate shape made of a ceramic and comprising a plurality of through holes, each of the plurality of through holes penetrating through a first surface and a second surface of the intermediate member, located opposite to each other;
a first member with a plate shape made of a ceramic and comprising a first groove portion on a third surface facing the first surface of the intermediate member; and
a second member with a plate shape made of a ceramic and comprising a plurality of second groove portions on a fourth surface facing the second surface of the intermediate member, wherein
a surface roughness of an inner surface of each of the plurality of second groove portions is larger than a surface roughness of an inner surface of each of the plurality of through holes in the intermediate member.
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