US 12,292,058 B2
Vacuum pump and water cooling spacer
Tooru Miwata, Chiba (JP); and Yoshiyuki Takai, Chiba (JP)
Assigned to Edwards Japan Limited, Chiba (JP)
Appl. No. 17/769,161
Filed by Edwards Japan Limited, Chiba (JP)
PCT Filed Oct. 27, 2020, PCT No. PCT/JP2020/040330
§ 371(c)(1), (2) Date Apr. 14, 2022,
PCT Pub. No. WO2021/085444, PCT Pub. Date May 6, 2021.
Claims priority of application No. 2019-195540 (JP), filed on Oct. 28, 2019.
Prior Publication US 2023/0272806 A1, Aug. 31, 2023
Int. Cl. F04D 29/58 (2006.01); F04D 19/04 (2006.01)
CPC F04D 29/582 (2013.01) [F04D 19/04 (2013.01); F04D 19/042 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A vacuum pump, comprising:
a casing having an inlet port;
a stator column provided upright inside the casing; and
a rotating body shaped to surround an outer periphery of the stator column, with gas being sucked in from the inlet port by rotation of the rotating body, wherein
the casing is composed of a plurality of components including a water cooling spacer having a water cooling pipe disposed therein,
the water cooling spacer is made of an aluminum alloy casting material having an elongation of 5% or more as a mechanical material property,
the casing includes therein a heater spacer for heating the gas sucked in from the inlet port,
the water cooling spacer includes a first flange portion, a body portion and a second flange portion, the first flange portion located on a tip end side of the body portion in the axial direction, and the second flange portion located on a base end side of the body portion,
the body portion is provided with a hole for inserting a heater attached to the heater spacer, the hole being a radially oriented through hole through which the heater is inserted into the heater spacer, the hole being disposed axially between the first flange portion and the second flange portion spacer,
outer diameters of the first flange portion and the second flange portion are larger than an outer diameter of the body portion so a step is formed between outer peripheral surfaces of the first and second flange portions and an outer peripheral surface of the body portion, and
the body portion functions as a storage portion for storing an electrical wire of the heater inserted in the hole by winding such that the electrical wire of the heater does not protrude radially outside the outer peripheral surfaces of the first and second flange portions.