US 12,291,778 B2
Liquid chromatography system and component
Gary A. Barone, State College, PA (US)
Assigned to Silcotek Corp., Bellefonte, PA (US)
Filed by SILCOTEK CORP., Bellefonte, PA (US)
Filed on Jun. 14, 2024, as Appl. No. 18/743,370.
Application 18/743,370 is a continuation of application No. 17/411,545, filed on Aug. 25, 2021, granted, now 12,037,685.
Application 17/411,545 is a continuation of application No. 16/870,034, filed on May 8, 2020, granted, now 11,131,020, issued on Sep. 28, 2021.
Application 16/870,034 is a continuation of application No. 15/755,962, granted, now 10,876,206, issued on Dec. 29, 2020, previously published as PCT/US2016/049647, filed on Aug. 31, 2016.
Claims priority of provisional application 62/212,868, filed on Sep. 1, 2015.
Prior Publication US 2024/0327981 A1, Oct. 3, 2024
Int. Cl. C23C 16/24 (2006.01); C23C 16/455 (2006.01); C23C 16/04 (2006.01)
CPC C23C 16/45523 (2013.01) [C23C 16/24 (2013.01); C23C 16/045 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A tube, comprising:
a substrate; and
an amorphous coating on the substrate;
wherein the amorphous coating includes silicon;
wherein the amorphous coating is devoid of particles of silicon dust formed from gas phase nucleation that are greater than 3 micrometers.