CPC C23C 16/45523 (2013.01) [C23C 16/24 (2013.01); C23C 16/045 (2013.01)] | 20 Claims |
1. A tube, comprising:
a substrate; and
an amorphous coating on the substrate;
wherein the amorphous coating includes silicon;
wherein the amorphous coating is devoid of particles of silicon dust formed from gas phase nucleation that are greater than 3 micrometers.
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