US 12,291,776 B2
Film and forming method thereof
Xinlian Deng, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Jan. 5, 2023, as Appl. No. 18/150,258.
Application 18/150,258 is a continuation of application No. PCT/CN2021/128070, filed on Nov. 2, 2021.
Claims priority of application No. 202110304036.9 (CN), filed on Mar. 22, 2021.
Prior Publication US 2023/0142204 A1, May 11, 2023
Int. Cl. C23C 16/27 (2006.01); C23C 16/513 (2006.01); C23C 16/56 (2006.01)
CPC C23C 16/276 (2013.01) [C23C 16/277 (2013.01); C23C 16/513 (2013.01); C23C 16/56 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method of forming a film, comprising:
providing a base;
forming a diamond-like carbon film on the base, wherein the diamond-like carbon film has a carbon-hydrogen chemical bond; and
performing photocatalytic treatment on the diamond-like carbon film, to break at least some of the carbon-hydrogen chemical bonds and reduce content of hydrogen elements in the diamond-like carbon film; and,
wherein the process parameters of the photocatalytic treatment comprise: a light wavelength range of 200 nanometers to 400 nanometers, a process time length of 3 minutes to 8 minutes, and a process temperature of 15 degree Celsius to 60 degree Celsius.